filename:TLM__MD_M029_S109_TARGET_EXPOSE_SCAN___COUNT_2900003.DAT
scan_file:SCAN_MD_M029_S109_2016-05-19T023500Z_TGT03
sw_ver:666
start_time:"2016-05-19 02:35:00.757950"
end_time:"2016-05-19 06:23:05.762367"
duration:"3:48:05.004417"
channel:ZS
tip_num:8
lin_pos:0.47486076142519262
tip_offset:-0.74366750591291719
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2230106050202183
set_pt:5.7782864118410009
fadj:6.1396200503547727
ctrl_image:False
mag_phase:True
work_pt:6.500654436479706
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-2.6963535859129166
y_orig_um:1.9555557120000002