filename:TLM__MD_M029_S109_TARGET_EXPOSE_SCAN___COUNT_2900003.DAT scan_file:SCAN_MD_M029_S109_2016-05-19T205452Z_TGT03 sw_ver:666 start_time:"2016-05-19 20:54:52.779251" end_time:"2016-05-20 00:40:50.783627" duration:"3:45:58.004376" channel:ZS tip_num:8 lin_pos:0.47486076142519262 tip_offset:-0.74366750591291719 wheel_pos:48 target:3 target_type:CAL x_orig:43988 y_orig:31360 xsteps:256 x_step:4 x_step_nm:15.25536 xlen_um:3.9053721599999998 ysteps:256 y_step:11 y_step_nm:15.277779000000001 ylen_um:3.911111424 z_step:4 z_ret:373 z_ret_nm:61.172000000000004 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:6 ac_gain:3 x_closed:False y_closed:True aborted:False dummy:False res_amp:7.3664454108491642 set_pt:5.8930342565041585 fadj:6.2613870450904097 ctrl_image:False mag_phase:True work_pt:6.629744667388336 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-2.6963535859129166 y_orig_um:1.9555557120000002