filename:TLM__MD_M029_S109_TARGET_EXPOSE_SCAN___COUNT_2900003.DAT
scan_file:SCAN_MD_M029_S109_2016-05-21T060805Z_TGT06
sw_ver:666
start_time:"2016-05-21 06:08:05.817853"
end_time:"2016-05-21 18:47:02.832551"
duration:"12:38:57.014698"
channel:ZS
tip_num:1
lin_pos:6.6471351186388956
tip_offset:-0.013542381933248748
wheel_pos:96
target:6
target_type:SILICON
x_orig:42554
y_orig:32487
xsteps:256
x_step:8
x_step_nm:30.510719999999999
xlen_um:7.8107443199999995
ysteps:256
y_step:22
y_step_nm:30.555558000000001
ylen_um:7.822222848
z_step:6
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:1.999847409781033
ctrl_image:False
mag_phase:True
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:120
z_settle:120
x_orig_um:-7.4352750219332506
y_orig_um:0.39027780900000003