filename:TLM__MD_M029_S109_TARGET_EXPOSE_SCAN___COUNT_2900003.DAT
scan_file:SCAN_MD_M029_S109_2016-05-22T081048Z_TGT13
sw_ver:666
start_time:"2016-05-22 08:10:48.848118"
end_time:"2016-05-22 17:50:15.859340"
duration:"9:39:27.011222"
channel:ZS
tip_num:1
lin_pos:6.6108186465247574
tip_offset:-63.567368581675161
wheel_pos:210
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:6
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:1.999847409781033
ctrl_image:False
mag_phase:False
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:125
z_settle:125
x_orig_um:-103.59743322167516
y_orig_um:408.17387458698823