filename:TLM__MD_M029_S109_TARGET_EXPOSE_SCAN___COUNT_2900003.DAT
scan_file:SCAN_MD_M029_S109_2016-05-22T223040Z_TGT13
sw_ver:666
start_time:"2016-05-22 22:30:40.864771"
end_time:"2016-05-23 19:07:24.888722"
duration:"20:36:44.023951"
channel:ZS
tip_num:1
lin_pos:6.5738918135347522
tip_offset:-128.18932631418429
wheel_pos:207
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:6
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:0.17456321049820706
set_pt:0.012207217517357137
fadj:0.034790569924467843
ctrl_image:False
mag_phase:True
work_pt:0.0418967687178805
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:-168.21939095418429
y_orig_um:-144.08000152870204