filename:TLM__MD_M030_S111_TARGET_EXPOSE_SCAN___COUNT_3000001.DAT
scan_file:SCAN_MD_M030_S111_2016-06-01T172055Z_TGT13
sw_ver:666
start_time:"2016-06-01 17:20:55.137653"
end_time:"2016-06-02 00:52:29.146399"
duration:"7:31:34.008746"
channel:ZS
tip_num:1
lin_pos:6.5735866330968182
tip_offset:-128.72339208056866
wheel_pos:206
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.8417639429312587
set_pt:0.68879224841687647
fadj:1.9684138246738383
ctrl_image:False
mag_phase:True
work_pt:2.362113451718406
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:120
z_settle:120
x_orig_um:-168.75345672056864
y_orig_um:-328.17386818698827