filename:TLM__MD_M030_S111_TARGET_EXPOSE_SCAN___COUNT_3000001.DAT
scan_file:SCAN_MD_M030_S111_2016-06-02T213736Z_TGT13
sw_ver:666
start_time:"2016-06-02 21:37:36.170512"
end_time:"2016-06-03 04:46:33.178820"
duration:"7:08:57.008308"
channel:ZS
tip_num:4
lin_pos:4.062867170214389
tip_offset:64.517547875180469
wheel_pos:205
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3054856183718631
set_pt:6.6443884946974903
fadj:7.0597390707255663
ctrl_image:False
mag_phase:True
work_pt:7.474873689741221
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:24.487483235180463
y_orig_um:-512.29546288018275