filename:TLM__MD_M030_S111_TARGET_EXPOSE_SCAN___COUNT_3000001.DAT
scan_file:SCAN_MD_M030_S111_2016-06-04T173617Z_TGT13
sw_ver:666
start_time:"2016-06-04 17:36:17.221615"
end_time:"2016-06-04 22:42:24.227544"
duration:"5:06:07.005929"
channel:ZS
tip_num:4
lin_pos:4.0259403372243838
tip_offset:-0.1044098573286476
wheel_pos:212
target:13
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:8
z_ret:15279
z_ret_nm:2505.7560000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3543144884412914
set_pt:6.683451590753033
fadj:7.1009384298466465
ctrl_image:False
mag_phase:True
work_pt:7.518819300263308
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-40.195495937328644
y_orig_um:776.45866646776335