filename:TLM__MD_M030_S111_TARGET_EXPOSE_SCAN___COUNT_3000001.DAT
scan_file:SCAN_MD_M030_S111_2016-06-06T053711Z_TGT13
sw_ver:666
start_time:"2016-06-06 05:37:11.263465"
end_time:"2016-06-06 15:04:33.274453"
duration:"9:27:22.010988"
channel:ZS
tip_num:4
lin_pos:4.0991836423285264
tip_offset:128.07137407492084
wheel_pos:210
target:13
target_type:SOLGEL
x_orig:34020
y_orig:3968
xsteps:160
x_step:131
x_step_nm:499.61304000000001
xlen_um:79.938086400000003
ysteps:160
y_step:360
y_step_nm:500.00004000000001
ylen_um:80.000006400000004
z_step:8
z_ret:9146
z_ret_nm:1499.944
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.4287785152971697
set_pt:6.7429617761501488
fadj:7.1644159609369042
ctrl_image:False
mag_phase:True
work_pt:7.585836356309489
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:88.102330874920852
y_orig_um:408.17387458698823