filename:TLM__MD_M030_S112_TARGET_EXPOSE_SCAN___COUNT_3000002.DAT scan_file:SCAN_MD_M030_S112_2016-06-08T072221Z_TGT13 sw_ver:666 start_time:"2016-06-08 07:22:21.321278" end_time:"2016-06-08 13:25:10.328304" duration:"6:02:49.007026" channel:ZS tip_num:4 lin_pos:3.8794537270160983 tip_offset:-256.45597772182839 wheel_pos:208 target:13 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:8 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.2468909742885472 set_pt:6.5973907072556646 fadj:7.0096894789044022 ctrl_image:False mag_phase:True work_pt:7.422138957114715 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:70 z_settle:70 x_orig_um:-296.48604236182837 y_orig_um:40.000003200000002