filename:TLM__MD_M030_S112_TARGET_EXPOSE_SCAN___COUNT_3000002.DAT scan_file:SCAN_MD_M030_S112_2016-06-09T121050Z_TGT13 sw_ver:666 start_time:"2016-06-09 12:10:50.354753" end_time:"2016-06-09 20:57:46.364958" duration:"8:46:56.010205" channel:ZS tip_num:1 lin_pos:6.7200732433051042 tip_offset:127.62817578393185 wheel_pos:206 target:13 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:8 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:3 x_closed:False y_closed:True aborted:False dummy:False res_amp:9.999847409781033 set_pt:0.69977874418249786 fadj:1.999847409781033 ctrl_image:False mag_phase:True work_pt:2.400054931081802 set_pt_per:6.999313344014649 work_pt_per:-24.000915541313802 xy_settle:130 z_settle:130 x_orig_um:87.598111143931845 y_orig_um:-328.17386818698827