filename:TLM__MD_M030_S112_TARGET_EXPOSE_SCAN___COUNT_3000002.DAT
scan_file:SCAN_MD_M030_S112_2016-06-09T223143Z_TGT13
sw_ver:666
start_time:"2016-06-09 22:31:43.366777"
end_time:"2016-06-10 05:09:59.374491"
duration:"6:38:16.007714"
channel:ZS
tip_num:1
lin_pos:6.5372701609826809
tip_offset:-192.277218280309
wheel_pos:206
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:1.999847409781033
ctrl_image:False
mag_phase:True
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:130
z_settle:130
x_orig_um:-232.30728292030901
y_orig_um:-328.17386818698827