filename:TLM__MD_M030_S112_TARGET_EXPOSE_SCAN___COUNT_3000002.DAT scan_file:SCAN_MD_M030_S112_2016-06-11T050107Z_TGT13 sw_ver:666 start_time:"2016-06-11 05:01:07.407165" end_time:"2016-06-11 12:23:27.415979" duration:"7:22:20.008814" channel:ZS tip_num:4 lin_pos:4.0256351567864499 tip_offset:-0.63847562371302047 wheel_pos:210 target:13 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:8 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.3915465018692306 set_pt:6.7130540932326239 fadj:7.1326771953917758 ctrl_image:False mag_phase:True work_pt:7.552327828286399 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:70 z_settle:70 x_orig_um:-40.668540263713027 y_orig_um:408.17387458698823