filename:TLM__MD_M030_S112_TARGET_EXPOSE_SCAN___COUNT_3000002.DAT
scan_file:SCAN_MD_M030_S112_2016-06-13T101436Z_TGT02
sw_ver:666
start_time:"2016-06-13 10:14:36.470802"
end_time:"2016-06-13 18:19:45.480470"
duration:"8:05:09.009668"
channel:ZS
tip_num:4
lin_pos:4.0259403372243838
tip_offset:-0.1044098573286476
wheel_pos:32
target:2
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:15255
z_ret_nm:2501.8200000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.1550316624704351
set_pt:6.5238422217135881
fadj:6.9315632867933168
ctrl_image:False
mag_phase:True
work_pt:7.339466277320039
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-40.134474497328654
y_orig_um:40.000003200000002