filename:TLM__MD_M030_S113_TARGET_EXPOSE_SCAN___COUNT_3000003.DAT scan_file:SCAN_MD_M030_S113_2016-06-15T073102Z_TGT13 sw_ver:667 start_time:"2016-06-15 07:31:02.524933" end_time:"2016-06-15 16:05:44.535190" duration:"8:34:42.010257" channel:ZS tip_num:1 lin_pos:6.6105134660868234 tip_offset:-64.101434348059541 wheel_pos:206 target:13 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:8 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:3 x_closed:False y_closed:True aborted:False dummy:False res_amp:9.999847409781033 set_pt:0.69977874418249786 fadj:1.999847409781033 ctrl_image:False mag_phase:True work_pt:2.400054931081802 set_pt_per:6.999313344014649 work_pt_per:-24.000915541313802 xy_settle:120 z_settle:120 x_orig_um:-104.13149898805953 y_orig_um:-328.17386818698827