filename:TLM__MD_M030_S113_TARGET_EXPOSE_SCAN___COUNT_3000003.DAT
scan_file:SCAN_MD_M030_S113_2016-06-16T214757Z_TGT13
sw_ver:667
start_time:"2016-06-16 21:47:57.570704"
end_time:"2016-06-17 04:32:00.578756"
duration:"6:44:03.008052"
channel:ZS
tip_num:4
lin_pos:3.8800640878919661
tip_offset:-255.38784618905964
wheel_pos:209
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.4176394293125814
set_pt:5.1340505073624785
fadj:5.454795147631037
ctrl_image:False
mag_phase:True
work_pt:5.775826522931035
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-295.41791082905968
y_orig_um:224.08000792870206