filename:TLM__MD_M030_S113_TARGET_EXPOSE_SCAN___COUNT_3000003.DAT
scan_file:SCAN_MD_M030_S113_2016-06-17T152352Z_TGT13
sw_ver:667
start_time:"2016-06-17 15:23:52.591746"
end_time:"2016-06-17 22:31:04.600259"
duration:"7:07:12.008513"
channel:ZS
tip_num:4
lin_pos:3.8431372549019609
tip_offset:-320.00980392156873
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.5113298237582971
set_pt:5.2091248950942246
fadj:5.534447241931792
ctrl_image:False
mag_phase:True
work_pt:5.860147163120289
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-360.03986856156877
y_orig_um:40.000003200000002