filename:TLM__MD_M030_S113_TARGET_EXPOSE_SCAN___COUNT_3000003.DAT
scan_file:SCAN_MD_M030_S113_2016-06-19T072334Z_TGT13
sw_ver:667
start_time:"2016-06-19 07:23:34.639565"
end_time:"2016-06-19 14:31:47.648098"
duration:"7:08:13.008533"
channel:ZS
tip_num:4
lin_pos:4.2087434195468072
tip_offset:319.80098420691223
wheel_pos:207
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.2366674296177615
set_pt:4.989394979781796
fadj:5.3009842069123367
ctrl_image:False
mag_phase:True
work_pt:5.612953103933551
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:279.77091956691226
y_orig_um:-144.08000152870204