filename:TLM__MD_M030_S113_TARGET_EXPOSE_SCAN___COUNT_3000003.DAT
scan_file:SCAN_MD_M030_S113_2016-06-20T131041Z_TGT13
sw_ver:667
start_time:"2016-06-20 13:10:41.675178"
end_time:"2016-06-20 13:23:11.675427"
duration:"0:12:30.000249"
channel:ZS
tip_num:8
lin_pos:0.43884946974898909
tip_offset:-63.763427939269107
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:48436
y_orig:17468
xsteps:32
x_step:205
x_step_nm:781.83719999999994
xlen_um:25.018790399999997
ysteps:32
y_step:562
y_step_nm:780.55561799999998
ylen_um:24.977779775999998
z_step:24
z_ret:8343
z_ret_nm:1368.252
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:0.23651483939879453
set_pt:0.21179522392614633
fadj:0.0
ctrl_image:True
mag_phase:True
work_pt:0.21286155096635845
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-48.752153699269108
y_orig_um:21.250001700000002