filename:TLM__MD_M030_S114_TARGET_EXPOSE_SCAN___COUNT_3000004.DAT
scan_file:SCAN_MD_M030_S114_2016-06-22T163733Z_TGT13
sw_ver:667
start_time:"2016-06-22 16:37:33.731010"
end_time:"2016-06-22 23:59:03.739641"
duration:"7:21:30.008631"
channel:ZS
tip_num:4
lin_pos:4.1724269474326698
tip_offset:256.24715800717183
wheel_pos:210
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11251
z_ret_nm:1845.164
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.444495307850767
set_pt:5.1554131380178534
fadj:5.4776836804760816
ctrl_image:False
mag_phase:True
work_pt:5.799996608718183
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:70
z_settle:70
x_orig_um:216.21709336717186
y_orig_um:408.17387458698823