filename:TLM__MD_M030_S114_TARGET_EXPOSE_SCAN___COUNT_3000004.DAT scan_file:SCAN_MD_M030_S114_2016-06-24T002925Z_TGT10 sw_ver:667 start_time:"2016-06-24 00:29:25.768384" end_time:"2016-06-24 03:43:09.772171" duration:"3:13:44.003787" channel:ZS tip_num:9 lin_pos:-0.44098573281452658 tip_offset:0.024967574578496628 wheel_pos:165 target:10 target_type:SOLGEL x_orig:33988 y_orig:3968 xsteps:96 x_step:219 x_step_nm:835.23095999999998 xlen_um:80.182172160000007 ysteps:96 y_step:600 y_step_nm:833.33339999999998 ylen_um:80.000006400000004 z_step:8 z_ret:15024 z_ret_nm:2463.9360000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:7.6075379568169677 set_pt:6.0859082932784005 fadj:6.4661631189440758 ctrl_image:False mag_phase:True work_pt:6.84672611934114 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-40.0661185054215 y_orig_um:960.67735314712388