filename:TLM__MD_M030_S114_TARGET_EXPOSE_SCAN___COUNT_3000004.DAT
scan_file:SCAN_MD_M030_S114_2016-06-24T161505Z_TGT13
sw_ver:667
start_time:"2016-06-24 16:15:05.786870"
end_time:"2016-06-24 21:14:34.792724"
duration:"4:59:29.005854"
channel:ZS
tip_num:4
lin_pos:4.0030518043793393
tip_offset:-40.159342336156612
wheel_pos:210
target:13
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:8
z_ret:15024
z_ret_nm:2463.9360000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.5345235370412755
set_pt:5.2274357213702602
fadj:5.5542839703974973
ctrl_image:False
mag_phase:True
work_pt:5.881021328118281
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-80.250428416156609
y_orig_um:408.17387458698823