filename:TLM__MD_M030_S114_TARGET_EXPOSE_SCAN___COUNT_3000004.DAT
scan_file:SCAN_MD_M030_S114_2016-06-25T014344Z_TGT13
sw_ver:667
start_time:"2016-06-25 01:43:44.797986"
end_time:"2016-06-25 23:06:03.823053"
duration:"21:22:19.025067"
channel:ZS
tip_num:4
lin_pos:4.0030518043793393
tip_offset:-40.159342336156612
wheel_pos:210
target:13
target_type:SOLGEL
x_orig:3193
y_orig:12412
xsteps:512
x_step:122
x_step_nm:465.28847999999999
xlen_um:238.22770176
ysteps:512
y_step:335
y_step_nm:465.27781500000003
ylen_um:238.22224128000002
z_step:8
z_ret:15024
z_ret_nm:2463.9360000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:6.4783703364614329
set_pt:5.1825741969939729
fadj:5.5066758220798047
ctrl_image:False
mag_phase:True
work_pt:5.8304838760178805
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-197.69763121615659
y_orig_um:396.44609587098824