filename:TLM__MD_M030_S114_TARGET_EXPOSE_SCAN___COUNT_3000004.DAT scan_file:SCAN_MD_M030_S114_2016-06-26T080035Z_TGT13 sw_ver:667 start_time:"2016-06-26 08:00:35.833502" end_time:"2016-06-26 20:33:44.848224" duration:"12:33:09.014722" channel:ZS tip_num:4 lin_pos:4.0488288700694284 tip_offset:39.950522621499317 wheel_pos:204 target:13 target_type:SOLGEL x_orig:33972 y_orig:3984 xsteps:224 x_step:94 x_step_nm:358.50095999999996 xlen_um:80.304215040000003 ysteps:224 y_step:257 y_step_nm:356.94447300000002 ylen_um:79.955561952000011 z_step:8 z_ret:7651 z_ret_nm:1254.7640000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:6.7618829633020523 set_pt:5.4093232623788818 fadj:5.7474631876096742 ctrl_image:False mag_phase:True work_pt:6.085643077111747 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:70 z_settle:70 x_orig_um:-0.20158489850066985 y_orig_um:-696.48088229176335