filename:TLM__MD_M030_S114_TARGET_EXPOSE_SCAN___COUNT_3000004.DAT
scan_file:SCAN_MD_M030_S114_2016-06-27T023110Z_TGT11
sw_ver:667
start_time:"2016-06-27 02:31:10.855211"
end_time:"2016-06-27 09:13:40.863080"
duration:"6:42:30.007869"
channel:ZS
tip_num:4
lin_pos:4.0259403372243838
tip_offset:-0.1044098573286476
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.5677882047760736
set_pt:5.2542915999084459
fadj:5.5826657511253526
ctrl_image:False
mag_phase:True
work_pt:5.910959275286452
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:70
z_settle:70
x_orig_um:-40.134474497328654
y_orig_um:40.000003200000002