filename:TLM__MD_M031_S115_TARGET_EXPOSE_SCAN___COUNT_3100001.DAT
scan_file:SCAN_MD_M031_S115_2016-06-29T072918Z_TGT03
sw_ver:667
start_time:"2016-06-29 07:29:18.917338"
end_time:"2016-06-29 14:10:29.925180"
duration:"6:41:11.007842"
channel:ZS
tip_num:2
lin_pos:5.7749294270237277
tip_offset:0.37649729152329314
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.2396429388876165
set_pt:0.64667734798199439
fadj:1.8478675516899368
ctrl_image:False
mag_phase:True
work_pt:2.2175988980813814
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:120
z_settle:120
x_orig_um:-1.5761887884767134
y_orig_um:1.9555557120000002