filename:TLM__MD_M031_S115_TARGET_EXPOSE_SCAN___COUNT_3100001.DAT
scan_file:SCAN_MD_M031_S115_2016-06-29T193729Z_TGT03
sw_ver:667
start_time:"2016-06-29 19:37:29.931572"
end_time:"2016-06-30 05:17:08.942904"
duration:"9:39:39.011332"
channel:ZS
tip_num:4
lin_pos:4.0402838178072784
tip_offset:24.996681162736877
wheel_pos:48
target:3
target_type:CAL
x_orig:44052
y_orig:31424
xsteps:448
x_step:2
x_step_nm:7.6276799999999998
xlen_um:3.4172006399999999
ysteps:448
y_step:6
y_step_nm:8.3333340000000007
ylen_um:3.7333336320000003
z_step:4
z_ret:152
z_ret_nm:24.928000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.733806363012131
set_pt:5.3870450904097051
fadj:5.7236591134508279
ctrl_image:False
mag_phase:True
work_pt:6.060374351061548
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:23.288080842736889
y_orig_um:1.8666668160000002