filename:TLM__MD_M031_S115_TARGET_EXPOSE_SCAN___COUNT_3100001.DAT scan_file:SCAN_MD_M031_S115_2016-07-03T093831Z_TGT13 sw_ver:667 start_time:"2016-07-03 09:38:31.032460" end_time:"2016-07-03 09:46:03.032608" duration:"0:07:32.000148" channel:ZS tip_num:8 lin_pos:0.43884946974898909 tip_offset:-63.763427939269107 wheel_pos:208 target:13 target_type:SOLGEL x_orig:49762 y_orig:24236 xsteps:32 x_step:82 x_step_nm:312.73487999999998 xlen_um:10.00751616 ysteps:32 y_step:225 y_step_nm:312.50002499999999 ylen_um:10.0000008 z_step:24 z_ret:3337 z_ret_nm:547.26800000000003 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:CON exc_lvl:6 ac_gain:3 x_closed:False y_closed:True aborted:False dummy:False res_amp:0.28137636377508202 set_pt:0.25665674830243379 fadj:0.0 ctrl_image:True mag_phase:True work_pt:0.25323658063352583 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-43.695001859269112 y_orig_um:11.850000948000002