filename:TLM__MD_M031_S115_TARGET_EXPOSE_SCAN___COUNT_3100001.DAT
scan_file:SCAN_MD_M031_S115_2016-07-03T213219Z_TGT13
sw_ver:667
start_time:"2016-07-03 21:32:19.046414"
end_time:"2016-07-04 05:54:07.056223"
duration:"8:21:48.009809"
channel:ZS
tip_num:2
lin_pos:5.7016861219195851
tip_offset:-127.79928664072619
wheel_pos:206
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.1465629053177686
set_pt:0.6402685587853818
fadj:1.829251544975967
ctrl_image:False
mag_phase:True
work_pt:2.1952588378384554
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:120
z_settle:120
x_orig_um:-167.8293512807262
y_orig_um:-328.17386818698827