filename:TLM__MD_M031_S116_TARGET_EXPOSE_SCAN___COUNT_3100002.DAT
scan_file:SCAN_MD_M031_S116_2016-07-10T212014Z_TGT03
sw_ver:667
start_time:"2016-07-10 21:20:14.243222"
end_time:"2016-07-11 06:56:50.254493"
duration:"9:36:36.011271"
channel:ZS
tip_num:8
lin_pos:0.47486076142519262
tip_offset:-0.74366750591291719
wheel_pos:48
target:3
target_type:CAL
x_orig:44052
y_orig:45824
xsteps:448
x_step:2
x_step_nm:7.6276799999999998
xlen_um:3.4172006399999999
ysteps:448
y_step:6
y_step_nm:8.3333340000000007
ylen_um:3.7333336320000003
z_step:4
z_ret:152
z_ret_nm:24.928000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.6173037308308533
set_pt:6.0938429846646827
fadj:6.4744029907682918
ctrl_image:False
mag_phase:True
work_pt:6.855515241445557
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-2.4522678259129194
y_orig_um:-18.133334784000002