filename:TLM__MD_M031_S116_TARGET_EXPOSE_SCAN___COUNT_3100002.DAT
scan_file:SCAN_MD_M031_S116_2016-07-12T062527Z_TGT10
sw_ver:667
start_time:"2016-07-12 06:25:27.282029"
end_time:"2016-07-12 08:37:16.284606"
duration:"2:11:49.002577"
channel:ZS
tip_num:9
lin_pos:-0.66956588082703894
tip_offset:-399.9902914473181
wheel_pos:165
target:10
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:8
z_ret:17825
z_ret_nm:2923.3000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.1150530251010906
set_pt:6.4917982757305257
fadj:6.8976882581826509
ctrl_image:False
mag_phase:True
work_pt:7.30348580870508
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-440.08137752731807
y_orig_um:960.67735314712388