filename:TLM__MD_M031_S116_TARGET_EXPOSE_SCAN___COUNT_3100002.DAT
scan_file:SCAN_MD_M031_S116_2016-07-12T135432Z_TGT10
sw_ver:667
start_time:"2016-07-12 13:54:32.290808"
end_time:"2016-07-12 18:52:57.296641"
duration:"4:58:25.005833"
channel:ZS
tip_num:9
lin_pos:-0.21240558480201419
tip_offset:400.04022659647512
wheel_pos:165
target:10
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:8
z_ret:17825
z_ret_nm:2923.3000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.0265506981002517
set_pt:6.4209964141298546
fadj:6.8223086900129699
ctrl_image:False
mag_phase:True
work_pt:7.223834389633798
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:359.94914051647515
y_orig_um:960.67735314712388