filename:TLM__MD_M031_S117_TARGET_EXPOSE_SCAN___COUNT_3100003.DAT
scan_file:SCAN_MD_M031_S117_2016-07-13T182036Z_TGT01
sw_ver:667
start_time:"2016-07-13 18:20:36.324158"
end_time:"2016-07-13 19:07:41.325078"
duration:"0:47:05.000920"
channel:ZS
tip_num:5
lin_pos:3.1305409323262379
tip_offset:-0.30336842908367601
wheel_pos:16
target:1
target_type:CAL
x_orig:43220
y_orig:32336
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:32
y_step:27
y_step_nm:37.500003
ylen_um:1.2000000959999999
z_step:4
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:7.9996948195620661
fadj:8.4998855573357748
ctrl_image:False
mag_phase:True
work_pt:8.999786374857635
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-5.1850836290836781
y_orig_um:0.60000004800000006