filename:TLM__MD_M031_S117_TARGET_EXPOSE_SCAN___COUNT_3100003.DAT
scan_file:SCAN_MD_M031_S117_2016-07-13T231552Z_TGT13
sw_ver:667
start_time:"2016-07-13 23:15:52.329930"
end_time:"2016-07-14 08:32:38.340814"
duration:"9:16:46.010884"
channel:ZS
tip_num:3
lin_pos:5.0080109864957656
tip_offset:191.76922636758906
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:6
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.2130922407873657
set_pt:1.3034256504158084
fadj:2.1371786068513008
ctrl_image:False
mag_phase:True
work_pt:2.345911395026478
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:120
z_settle:120
x_orig_um:151.73916172758905
y_orig_um:40.000003200000002