filename:TLM__MD_M031_S117_TARGET_EXPOSE_SCAN___COUNT_3100003.DAT
scan_file:SCAN_MD_M031_S117_2016-07-14T111951Z_TGT10
sw_ver:667
start_time:"2016-07-14 11:19:51.344083"
end_time:"2016-07-14 15:56:10.349484"
duration:"4:36:19.005401"
channel:ZS
tip_num:9
lin_pos:-0.66956588082703894
tip_offset:-399.9902914473181
wheel_pos:155
target:10
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:8
z_ret:15279
z_ret_nm:2505.7560000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3439383535515379
set_pt:6.674906538490883
fadj:7.0923933775844965
ctrl_image:False
mag_phase:True
work_pt:7.509480858027364
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-440.08137752731807
y_orig_um:-880.67734674712381