filename:TLM__MD_M031_S117_TARGET_EXPOSE_SCAN___COUNT_3100003.DAT scan_file:SCAN_MD_M031_S117_2016-07-14T174250Z_TGT10 sw_ver:667 start_time:"2016-07-14 17:42:50.351569" end_time:"2016-07-14 22:19:09.356971" duration:"4:36:19.005402" channel:ZS tip_num:9 lin_pos:-0.21240558480201419 tip_offset:400.04022659647512 wheel_pos:155 target:10 target_type:SOLGEL x_orig:33988 y_orig:3968 xsteps:96 x_step:219 x_step_nm:835.23095999999998 xlen_um:80.182172160000007 ysteps:96 y_step:600 y_step_nm:833.33339999999998 ylen_um:80.000006400000004 z_step:8 z_ret:15279 z_ret_nm:2505.7560000000003 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.3726253147173271 set_pt:6.6981002517738615 fadj:7.1165026321812768 ctrl_image:False mag_phase:True work_pt:7.535298904209089 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:359.94914051647515 y_orig_um:-880.67734674712381