filename:TLM__MD_M031_S117_TARGET_EXPOSE_SCAN___COUNT_3100003.DAT scan_file:SCAN_MD_M031_S117_2016-07-19T044806Z_TGT11 sw_ver:667 start_time:"2016-07-19 04:48:06.473082" end_time:"2016-07-19 15:15:30.485350" duration:"10:27:24.012268" channel:ZS tip_num:4 lin_pos:4.0259403372243838 tip_offset:-0.1044098573286476 wheel_pos:176 target:11 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:6 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:7.2883192187380788 set_pt:5.8304722667277025 fadj:6.1948577096208135 ctrl_image:False mag_phase:True work_pt:6.559431690552997 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:120 z_settle:120 x_orig_um:-40.134474497328654 y_orig_um:40.000003200000002