filename:TLM__MD_M031_S117_TARGET_EXPOSE_SCAN___COUNT_3100003.DAT
scan_file:SCAN_MD_M031_S117_2016-07-19T164204Z_TGT03
sw_ver:667
start_time:"2016-07-19 16:42:04.487042"
end_time:"2016-07-19 23:06:32.494560"
duration:"6:24:28.007518"
channel:ZS
tip_num:3
lin_pos:4.8984512092774857
tip_offset:0.039616235599183369
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:38560
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:5.2152285038529032
set_pt:1.3037308308537423
fadj:2.1380941481651026
ctrl_image:False
mag_phase:True
work_pt:2.346872721555291
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:120
z_settle:120
x_orig_um:-1.9130698444008232
y_orig_um:-8.0444450880000016