filename:TLM__MD_M031_S118_TARGET_EXPOSE_SCAN___COUNT_3100004.DAT
scan_file:SCAN_MD_M031_S118_2016-07-21T210927Z_TGT13
sw_ver:667
start_time:"2016-07-21 21:09:27.548583"
end_time:"2016-07-22 06:39:49.559736"
duration:"9:30:22.011153"
channel:ZS
tip_num:3
lin_pos:4.8987563897154196
tip_offset:0.57368200198355623
wheel_pos:206
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:6
z_ret:13348
z_ret_nm:2189.0720000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.1841000991836426
set_pt:0.3628595407034409
fadj:1.036697947661555
ctrl_image:False
mag_phase:True
work_pt:1.244231486382231
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:120
z_settle:120
x_orig_um:-39.456382638016443
y_orig_um:-328.17386818698827