filename:TLM__MD_M031_S118_TARGET_EXPOSE_SCAN___COUNT_3100004.DAT
scan_file:SCAN_MD_M031_S118_2016-07-22T190043Z_TGT12
sw_ver:667
start_time:"2016-07-22 19:00:43.574222"
end_time:"2016-07-23 02:23:36.582882"
duration:"7:22:53.008660"
channel:ZS
tip_num:4
lin_pos:4.0717174029144729
tip_offset:80.005455100327282
wheel_pos:191
target:12
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2736705577172502
set_pt:5.8188754100862132
fadj:6.1826504921034564
ctrl_image:False
mag_phase:True
work_pt:6.546248007396371
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:70
z_settle:70
x_orig_um:39.975390460327276
y_orig_um:-144.08000152870204