filename:TLM__MD_M031_S118_TARGET_EXPOSE_SCAN___COUNT_3100004.DAT
scan_file:SCAN_MD_M031_S118_2016-07-23T130647Z_TGT12
sw_ver:667
start_time:"2016-07-23 13:06:47.595458"
end_time:"2016-07-23 20:31:13.604148"
duration:"7:24:26.008690"
channel:ZS
tip_num:4
lin_pos:4.071412222476539
tip_offset:79.471389333942909
wheel_pos:193
target:12
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.3426413366903178
set_pt:5.8741130693522541
fadj:6.2412451361867705
ctrl_image:False
mag_phase:True
work_pt:6.608321182258818
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:70
z_settle:70
x_orig_um:39.441324693942903
y_orig_um:224.08000792870206