filename:TLM__MD_M031_S118_TARGET_EXPOSE_SCAN___COUNT_3100004.DAT
scan_file:SCAN_MD_M031_S118_2016-07-25T122032Z_TGT02
sw_ver:667
start_time:"2016-07-25 12:20:32.650867"
end_time:"2016-07-26 15:19:19.682519"
duration:"1 day, 2:58:47.031652"
channel:ZS
tip_num:7
lin_pos:1.3705653467612726
tip_offset:-0.010643167773039863
wheel_pos:32
target:2
target_type:CAL
x_orig:33940
y_orig:3968
xsteps:384
x_step:55
x_step_nm:209.7612
xlen_um:80.548300799999993
ysteps:384
y_step:150
y_step_nm:208.33335
ylen_um:80.000006400000004
z_step:8
z_ret:5116
z_ret_nm:839.024
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:5
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.1995880064087885
set_pt:6.5595483329518576
fadj:6.9697108415350577
ctrl_image:False
mag_phase:True
work_pt:7.379566646921444
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-40.284793567773036
y_orig_um:40.000003200000002