filename:TLM__MD_M032_S119_TARGET_EXPOSE_SCAN___COUNT_3200001.DAT
scan_file:SCAN_MD_M032_S119_2016-07-27T074046Z_TGT13
sw_ver:667
start_time:"2016-07-27 07:40:46.701709"
end_time:"2016-07-27 18:06:19.713940"
duration:"10:25:33.012231"
channel:ZS
tip_num:3
lin_pos:5.0080109864957656
tip_offset:191.76922636758906
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:41940
y_orig:25600
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:28
y_step_nm:38.888891999999998
ylen_um:9.9555563520000003
z_step:6
z_ret:711
z_ret_nm:116.604
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:0.69672693980315858
set_pt:0.20904859998474098
fadj:0.285648889906157
ctrl_image:False
mag_phase:True
work_pt:0.313529780754329
set_pt_per:29.999237048905165
work_pt_per:-45.00038147554742
xy_settle:120
z_settle:120
x_orig_um:182.00579596758905
y_orig_um:9.9555563520000003