filename:TLM__MD_M032_S119_TARGET_EXPOSE_SCAN___COUNT_3200001.DAT
scan_file:SCAN_MD_M032_S119_2016-07-28T114820Z_TGT13
sw_ver:667
start_time:"2016-07-28 11:48:20.734706"
end_time:"2016-07-29 00:31:52.749635"
duration:"12:43:32.014929"
channel:ZS
tip_num:3
lin_pos:5.0080109864957656
tip_offset:191.76922636758906
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:41940
y_orig:32768
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:28
y_step_nm:38.888891999999998
ylen_um:9.9555563520000003
z_step:6
z_ret:711
z_ret_nm:116.604
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.2652780956740672
set_pt:1.5796139467460135
fadj:2.1588464179446096
ctrl_image:False
mag_phase:True
work_pt:2.369395228801769
set_pt_per:29.999237048905165
work_pt_per:-45.00038147554742
xy_settle:120
z_settle:120
x_orig_um:182.00579596758905
y_orig_um:0.0