filename:TLM__MD_M032_S119_TARGET_EXPOSE_SCAN___COUNT_3200001.DAT scan_file:SCAN_MD_M032_S119_2016-07-29T162607Z_TGT13 sw_ver:667 start_time:"2016-07-29 16:26:07.768294" end_time:"2016-07-30 07:52:05.786399" duration:"15:25:58.018105" channel:ZS tip_num:3 lin_pos:5.0080109864957656 tip_offset:191.76922636758906 wheel_pos:208 target:13 target_type:SOLGEL x_orig:44212 y_orig:31328 xsteps:288 x_step:2 x_step_nm:7.6276799999999998 xlen_um:2.1967718399999998 ysteps:288 y_step:5 y_step_nm:6.944445 ylen_um:2.0000001599999999 z_step:6 z_ret:140 z_ret_nm:22.960000000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:1 ac_gain:1 x_closed:False y_closed:True aborted:False dummy:False res_amp:5.2344548714427406 set_pt:1.5701533531700618 fadj:2.1460288395513847 ctrl_image:False mag_phase:True work_pt:2.3555246603146087 set_pt_per:29.999237048905165 work_pt_per:-45.00038147554742 xy_settle:120 z_settle:120 x_orig_um:190.67084044758906 y_orig_um:2.0000001600000004