filename:TLM__MD_M032_S119_TARGET_EXPOSE_SCAN___COUNT_3200001.DAT
scan_file:SCAN_MD_M032_S119_2016-08-01T221629Z_TGT01
sw_ver:667
start_time:"2016-08-01 22:16:29.859614"
end_time:"2016-08-02 02:34:55.864667"
duration:"4:18:26.005053"
channel:ZS
tip_num:1
lin_pos:6.8238345922026395
tip_offset:309.21053635461863
wheel_pos:16
target:1
target_type:CAL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:8
z_ret:12586
z_ret_nm:2064.1040000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:2.5000381475547417
fadj:4.0997940032043942
ctrl_image:False
mag_phase:True
work_pt:4.499969481374112
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:120
z_settle:120
x_orig_um:264.17671363461864
y_orig_um:45.000003600000007