filename:TLM__MD_M032_S119_TARGET_EXPOSE_SCAN___COUNT_3200001.DAT
scan_file:SCAN_MD_M032_S119_2016-08-02T125032Z_TGT01
sw_ver:667
start_time:"2016-08-02 12:50:32.876704"
end_time:"2016-08-02 16:05:25.880515"
duration:"3:14:53.003811"
channel:ZS
tip_num:3
lin_pos:5.0388342107270923
tip_offset:245.70986877241069
wheel_pos:16
target:1
target_type:CAL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:8
z_ret:12586
z_ret_nm:2064.1040000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.2845044632639047
set_pt:4.2276646066987107
fadj:4.4916456855115587
ctrl_image:False
mag_phase:True
work_pt:4.756013698752856
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:120
z_settle:120
x_orig_um:200.6760460524107
y_orig_um:45.000003600000007