filename:TLM__MD_M032_S119_TARGET_EXPOSE_SCAN___COUNT_3200001.DAT
scan_file:SCAN_MD_M032_S119_2016-08-02T164608Z_TGT02
sw_ver:667
start_time:"2016-08-02 16:46:08.881311"
end_time:"2016-08-02 23:06:31.888748"
duration:"6:20:23.007437"
channel:ZS
tip_num:7
lin_pos:1.3702601663233387
tip_offset:-0.54470893415741273
wheel_pos:32
target:2
target_type:CAL
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:8
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:5
ac_gain:4
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:9.0281528953994048
set_pt:7.2224002441443504
fadj:7.6737621118486308
ctrl_image:False
mag_phase:True
work_pt:8.125268725468107
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-20.559741254157416
y_orig_um:19.911112704000001