filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT
scan_file:SCAN_MD_M032_S120_2016-08-03T070636Z_TGT03
sw_ver:667
start_time:"2016-08-03 07:06:36.898135"
end_time:"2016-08-03 11:15:27.903001"
duration:"4:08:51.004866"
channel:ZS
tip_num:8
lin_pos:0.47486076142519262
tip_offset:-0.74366750591291719
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:38560
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0133516441596093
set_pt:5.6107423514152739
fadj:5.9613946746013582
ctrl_image:False
mag_phase:True
work_pt:6.311962971300495
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:60
z_settle:60
x_orig_um:-2.6963535859129166
y_orig_um:-8.0444450880000016