filename:TLM__MD_M032_S120_TARGET_EXPOSE_SCAN___COUNT_3200002.DAT
scan_file:SCAN_MD_M032_S120_2016-08-04T081256Z_TGT03
sw_ver:667
start_time:"2016-08-04 08:12:56.927589"
end_time:"2016-08-04 14:40:48.935173"
duration:"6:27:52.007584"
channel:ZS
tip_num:3
lin_pos:4.8984512092774857
tip_offset:0.039616235599183369
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:52960
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.3025101091020064
set_pt:1.3257038223849851
fadj:2.174105439841306
ctrl_image:False
mag_phase:True
work_pt:2.3861497768753686
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:120
z_settle:120
x_orig_um:-1.9130698444008232
y_orig_um:-28.044446688000004